香港城市大学新型元透镜彻底改变了传统的真空紫外光学技术

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新型元透镜彻底改变了传统的真空紫外光学技术

指南者留学 2022-06-15 12:24:11 阅读量：1440

<p>指南者留学全国统一咨询热线：<a href="tel:4001831832" style="color:#1677ff; text-decoration:none;">400-183-1832</a>，全国各地区、各分公司联系方式均为此号码。</p><div data-page-id="doxcnl5Xv9yOIYBCdE78cklTqCg" data-docx-has-block-data="true"> <div class="image-uploaded gallery old-record-id-doxcns4kGCm0MOoKuSwGUqQIPyf" style="text-align: justify;" data-type="image" data-ace-gallery-json="{"items":[{"uuid":"c0d36812-0da4-4eba-86bf-69bb12590ed6","height":1065,"width":1600,"currHeight":1065,"currWidth":1600,"natrualHeight":1065,"natrualWidth":1600,"pluginName":"imageUpload","scale":1,"src":"https%3A%2F%2Finternal-api-drive-stream.feishu.cn%2Fspace%2Fapi%2Fbox%2Fstream%2Fdownload%2Fall%2FboxcnPxeugEiEGzgtUOog3iax5u%2F%3Fmount_node_token%3Ddoxcns4kGCm0MOoKuSwGUqQIPyf%26mount_point%3Ddocx_image","file_token":"boxcnPxeugEiEGzgtUOog3iax5u","image_type":"image/png","size":2053845,"comments":[]}]}"> <div data-page-id="doxcnl5Xv9yOIYBCdE78cklTqCg" data-docx-has-block-data="true"> <div class="image-uploaded gallery old-record-id-doxcns4kGCm0MOoKuSwGUqQIPyf" style="text-align: center;" data-type="image" data-ace-gallery-json="{"items":[{"uuid":"8bfa8987-1ecf-4b03-b1c3-b1cfb0b3a3b1","height":1065,"width":1600,"currHeight":1065,"currWidth":1600,"natrualHeight":1065,"natrualWidth":1600,"pluginName":"imageUpload","scale":1,"src":"https%3A%2F%2Finternal-api-drive-stream.feishu.cn%2Fspace%2Fapi%2Fbox%2Fstream%2Fdownload%2Fall%2FboxcnPxeugEiEGzgtUOog3iax5u%2F%3Fmount_node_token%3Ddoxcns4kGCm0MOoKuSwGUqQIPyf%26mount_point%3Ddocx_image","file_token":"boxcnPxeugEiEGzgtUOog3iax5u","image_type":"image/png","size":2053845,"comments":[]}]}"><img src="https://info.compassedu.hk/sucai/content/1657534508529/1657534508529.png" width="807" height="537" /></div> </div> </div> <div class="ace-line ace-line old-record-id-doxcnmkySkskS2gu4kTctKEvz2e" style="text-align: center;"><span class="h6"><em>蔡丁炳教授（右）及陈木固博士。</em></span></div> <div class="ace-line ace-line old-record-id-doxcnmkySkskS2gu4kTctKEvz2e" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnemkyGA0McS2wiuUYu3Ccdd" style="text-align: justify;"><span class="p"><strong>由香港城市大学（城大）共同领导的一个研究小组成功开发出一种新型真空紫外（VUV）元透镜，可以产生和聚焦VUV光，这是VUV光学市场的颠覆性技术。</strong></span></div> <div class="ace-line ace-line old-record-id-doxcnemkyGA0McS2wiuUYu3Ccdd" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcn8kEIkIco6oeaq4mgOZLqRg" style="text-align: justify;"><span class="p">VUV用于半导体制造，光化学和材料科学。聚焦VUV光源是纳米光刻，材料加工，先进制造和其他工业领域强烈需要的。</span></div> <div class="ace-line ace-line old-record-id-doxcn8kEIkIco6oeaq4mgOZLqRg" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnK60qiCYKqoSSwLxXh6bHQf" style="text-align: justify;"><span class="p">但是，使用起来成本很高。波长在100至200纳米（nm）之间的VUV被空气中的氧气强烈吸收，需要真空室或其他专用环境。</span></div> <div class="ace-line ace-line old-record-id-doxcnK60qiCYKqoSSwLxXh6bHQf" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnK60qiCYKqoSSwLxXh6bHQf" style="text-align: justify;"><span class="p">传统上，非常笨重和昂贵的系统具有特殊和稀有的非线性晶体用于产生和聚焦VUV光。</span></div> <div class="ace-line ace-line old-record-id-doxcnK60qiCYKqoSSwLxXh6bHQf" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnOmwAmkCeMQmwsRCw3yhnrc" style="text-align: justify;"><span class="p">此外，几乎所有用于传统镜片的玻璃都不适合VUV，因为它们在该地区具有很强的吸收性。目前用于镜片的少数VUV透射材料相对脆弱，对薄镜片的制造和设计施加了实际限制。</span></div> <div class="ace-line ace-line old-record-id-doxcnOmwAmkCeMQmwsRCw3yhnrc" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnUSEoEgASuye2iLb1wjSeb7" style="text-align: justify;"><span class="p">电气工程系（EE）讲座教授<strong>蔡定平教授</strong>和EE研究助理教授<strong>陈木谷博士</strong>设计并制造了150纳米长的三角形氧化锌纳米天线阵列，形成VUV元透镜。</span></div> <div class="ace-line ace-line old-record-id-doxcnUSEoEgASuye2iLb1wjSeb7" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnaKAIy24UWog8qSmLcC2aRg" style="text-align: justify;"><span class="p">“我们开发了一种在氧化锌薄膜上具有复杂纳米结构的元透镜。它能够转换和聚焦VUV光。这种元透镜为非线性VUV的产生和聚焦产生的光提供了一种紧凑的方法，“Tsai教授说，他是最近发表在<em>《科学进展》上的</em>论文的通讯作者之一，题为”<a href="https://www.science.org/doi/10.1126/sciadv.abn5644" target="_blank" rel="noopener">真空紫外线非线性超透镜</a>”。</span></div> <div class="ace-line ace-line old-record-id-doxcnaKAIy24UWog8qSmLcC2aRg" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnKgSGGGq46CEOU1cBybAX1g" style="text-align: justify;"><span class="p">直径为45微米的新型VUV元透镜可以将394nm波长的UV光转换为197nm波长的VUV光，并将VUV光聚焦在直径小于200万分之一米的小点上。在美国莱斯大学的测试中，一个聚焦的光点将功率密度提高了21倍。</span></div> <div class="ace-line ace-line old-record-id-doxcnKgSGGGq46CEOU1cBybAX1g" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcneg2GiMyGQkkKSqd7DQ8Xlh" style="text-align: justify;"><span class="p">“我们的VUV元透镜结构紧凑，重量轻，效率高，可以通过半导体电子制造工艺批量生产。这种新颖而颠覆性的元器件可以彻底改变传统的VUV光学技术及其市场，“蔡教授说。</span></div> <div class="ace-line ace-line old-record-id-doxcneg2GiMyGQkkKSqd7DQ8Xlh" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnqiee0iKOSmqcSl97f73SXS" style="text-align: justify;"><span class="p">元透镜可以大大简化VUV系统设计，并促进更先进的应用。这项工作为开发低损耗VUV组件和提高VUV制度的可访问性提供了一个有用的平台。</span></div> <div class="ace-line ace-line old-record-id-doxcnqiee0iKOSmqcSl97f73SXS" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcnwSsiEemiawA2KswZI3cVnh" style="text-align: justify;"><span class="p">本研究由香港特区政府大学教育资助委员会/研究资助局卓越领域计划（AoE）资助。蔡教授是AoE项目“元光学，元声学和元器件”的项目协调员。</span></div> <div class="ace-line ace-line old-record-id-doxcnwSsiEemiawA2KswZI3cVnh" style="text-align: justify;"> </div> <div class="ace-line ace-line old-record-id-doxcncoOIMMGuuGKY4Zrv5gICvf" style="text-align: justify;"><span class="p">该论文的共同作者包括美国莱斯大学的<strong>Naomi Halas教授，Peter Nordlander教授</strong>，<strong>Michael Semmlinger博士，Ming Zhang博士</strong>，<strong>Catherine Arndt博士，Benjamin Cerjan</strong>博士和<strong>Jan Yang博士</strong>;台湾国立阳明交通大学<strong>曾明伦博士</strong>;台湾中央研究院<strong>的黄子廷</strong>和<strong>朱成雄博士</strong>;国立台湾大学<strong>郭信宇博士</strong>;和台湾国立联合大学的<strong>Vin-Cent Su博士</strong>。</span></div> <div class="image-uploaded gallery old-record-id-doxcn6sgm6oKuiSS20aSJNYUDwb" style="text-align: justify;" data-type="image" data-ace-gallery-json="{"items":[{"uuid":"1e7b2a88-2171-4104-87bf-07946c0f7bfe","height":900,"width":1600,"currHeight":900,"currWidth":1600,"natrualHeight":900,"natrualWidth":1600,"pluginName":"imageUpload","scale":1,"src":"https%3A%2F%2Finternal-api-drive-stream.feishu.cn%2Fspace%2Fapi%2Fbox%2Fstream%2Fdownload%2Fall%2FboxcnH33TatWPM1cjZPPbJZMQzf%2F%3Fmount_node_token%3Ddoxcn6sgm6oKuiSS20aSJNYUDwb%26mount_point%3Ddocx_image","file_token":"boxcnH33TatWPM1cjZPPbJZMQzf","image_type":"image/png","size":1288069,"comments":[]}]}"> <div data-page-id="doxcnl5Xv9yOIYBCdE78cklTqCg" data-docx-has-block-data="true"> <div class="image-uploaded gallery old-record-id-doxcn6sgm6oKuiSS20aSJNYUDwb" style="text-align: center;" data-type="image" data-ace-gallery-json="{"items":[{"uuid":"7010491a-731b-437e-a9d9-3e4a1ad831a4","height":900,"width":1600,"currHeight":900,"currWidth":1600,"natrualHeight":900,"natrualWidth":1600,"pluginName":"imageUpload","scale":1,"src":"https%3A%2F%2Finternal-api-drive-stream.feishu.cn%2Fspace%2Fapi%2Fbox%2Fstream%2Fdownload%2Fall%2FboxcnH33TatWPM1cjZPPbJZMQzf%2F%3Fmount_node_token%3Ddoxcn6sgm6oKuiSS20aSJNYUDwb%26mount_point%3Ddocx_image","file_token":"boxcnH33TatWPM1cjZPPbJZMQzf","image_type":"image/png","size":1288069,"comments":[]}]}"><img src="https://info.compassedu.hk/sucai/content/1657534501379/1657534501379.png" width="807" height="454" /></div> </div> </div> <div class="ace-line ace-line old-record-id-doxcn6WqGaI8qq4okemjexo6zlg" style="text-align: justify;"><span class="p"><em>新型元透镜将394纳米紫外线（蓝色）转换为197纳米“真空紫外线”（粉红色），并将VUV输出聚焦在直径小于200万分之一米的小点上。微小的三角形纳米谐振器，在氧化锌（ZnO）的微观圆盘上精确配置的同心圆中。图中显示了元透镜的几个扫描电子显微镜（SEM）图像（右下角）。在SEM图像中可以观察到具有规则变化的旋转角度的明确定义的纳米三角形。</em></span></div> </div>

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